Bellows Pumps
for semiconductor production
Pumps
Spela Pillar Bellows Pump PE Series
Highly reliable bellows pumps with extended durability.
Advantages:
- excellent life-cycle durability
- in-house production assures quality
- low total cost of ownership
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Spela Pillar Bellows Pump PE Series High Temperature
Highly reliable bellows pumps with extended durability.
Advantages
- applicable for various chemicals
- excellent life-cycle durability
- in-house production assures quality
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Spela 300 Pillar Bellows Pump PE-E Series
Compact pump solution for your limited space
Advantages:
- compact design for limited space
- high reliability
- various solutions possible
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Spela 300 Pillar Bellows Pump PS Series
PTFE Bellows Pump with no pulsation.
Advantages:
- low pulsation pressure
- space saving design
- reduced cost due to VA design
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Spela 300 Pillar Bellows Pump PS-E Series
PTFE Bellows Pump with no pulsation. More compact.
Advantages:
- minimized pulsation pressure
- compact design
- reduced cost due to VA design
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Spela 300 Pillar Bellows Pump PS-E Series High Temperature
PTFE bellows pump more compact and without pulsation.
Advantages:
- applicable for various chemicals
- minimized pulsation pressure
- reduced cost due to VA design
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Pillar Bellows Pump PK-Series
Compact bellows pump with large flow rate
Advantages:
- small footprint with large flow rate
- high discharge head usage possible
- low pulsation
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Pillar Bellows Pump PC Series
CMP slurry pump
Advantages:
- excellent drainage
- optimized for silica-based as well as metal based rapid sedimentation slurries
- allows low pulsation slurry discharges
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Bellows Metering Pump PW-Series
Designed for precise chemical dispensing
Advantages:
- highly precise chemical dispensing
- wide range of possible flow rates
- high accuracy without back pressure device
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Super Dispensing Pump PT-Series
Dispensing Pump PT-Series
Advantages:
- high speed response
- excellent liquid control property
- compact size
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical
Auto Accumulator PA-Series
The PA series Auto Accumulator is designed for fully automtaic operation.
Advantages:
- fully automatic operation
- wide range of operation temperature
- downward facing bellows
Industries:
- Semiconductor & LCD
- Food
- Pharmaceutical